Opto-Electronic Engineering, Volume. 33, Issue 3, 101(2006)

Temperature field simulation of GaN material during Al2O3/GaN laser lift-off

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    References(6)

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    [2] [2] NAKAMURA S,SENOH M,NAGAHAMA S,et al.Violet InGaN/GaN/AlGaN based laser diodes with an output power of 420mW[J].Jpn.J.Appl.Phys.Part 2-Lett,1998,37(6A):1627-1629.

    [3] [3] T.EGAWA,H.OHMURA,H.ISHIKAWA,et al.Demonstration of an InGaN-based light emitting diode on an AlN/Sapphire template by metalorganic chemical vapor deposition[J].Appl.Phys.Lett,2002,81(2):292-294.

    [4] [4] Chia-Ming LEE,Chang-Ceng CHUO,I-Ling CHEN,et al.High-brightness inverted InGaN -GaN multi-quantum-well light-emitting diodes without a transparent conductive layer[J].IEEE Electron Device Letters,2003,24(3):156-158.

    [5] [5] W.S.WONG,T.SANDS,N.W.CHEUNG,et al.InxGa1-xN light emitting diodes on Si substrates fabricated by Pd-In metal bonding and laser lift-off[J].Appl.Phys.Lett,2000,77(18):2822-2824.

    [6] [6] Martin Von ALLMEN,Andreas BLASTTER.Laser-beam interactions with materials[M].Berlin:Springer-Verlag,1995.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Temperature field simulation of GaN material during Al2O3/GaN laser lift-off[J]. Opto-Electronic Engineering, 2006, 33(3): 101

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    Paper Information

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    Received: Jan. 6, 2006

    Accepted: --

    Published Online: Nov. 14, 2007

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