Spectroscopy and Spectral Analysis, Volume. 39, Issue 4, 1242(2019)
Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma
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SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, ZHANG Wen-yuan. Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma[J]. Spectroscopy and Spectral Analysis, 2019, 39(4): 1242
Paper Information
Received: Apr. 15, 2018
Accepted: --
Published Online: Apr. 11, 2019
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