Fig. 1. Reflectance distribution and defect model of high-reflection film. (a) Reflectance distribution; (b) defect model

Fig. 2. Distributions of different fields. (a) Incident field; (b) total field without defect; (c) total field with defect; (d) scattering field

Fig. 3. Spatial scattering field distributions of 9 groups of defects. （a）?(i) Group 1?group 9

Fig. 4. Variation of integral scattering light with the defect. (a) Variation of scattering light intensity with width; (b) variation of scattering light intensity with depth

Fig. 5. Principle of the integrated scattering measurement system

Fig. 6. Test system. (a) Integral scattering measurement system; (b) integrating sphere

Fig. 7. Test results of voltage. (a) Reference voltage after attenuation of incident light; (b) voltage of scattering light from standard sample

Fig. 8. Variation of the sample scattering rate. (a) Variation of scattering rate with width; (b) variation of scattering rate with depth