Opto-Electronic Engineering, Volume. 50, Issue 3, 220322(2023)

Femtosecond laser direct writing processing of SERS substrates and applications

Zhidong Yin1... Caiding Ni2, Sizhu Wu1 and Zhaoxin Lao1,* |Show fewer author(s)
Author Affiliations
  • 1Hefei University of Technology, School of Instrument Science and Optoelectronic Engineering, Hefei, Anhui 230009, China
  • 2University of Science and Technology of China, School of Engineering Sciences, Hefei, Anhui 230026, China
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    Figures & Tables(10)
    Four methods of femtosecond laser preparation SERS substrate [7, 30-32]. Figure reproduced with permission from: ref. [7] © Wiley; ref. [30-31] © Elsevier; ref. [32] © The Royal Society of Chemistry
    SERS principle. (a) Inelastic light scattering of molecules on corrugated metal surfaces[33]; (b) localized surface plasmon resonances (LSPRs) on the surface of precious metals[36]. Figure reproduced with permission from: (a) ref. [33] © American Chemical Society; (b) ref. [36] © The Royal Society of Chemistry
    Preparation of SERS microstructures by top-down micromachining and particle self-assembly. (a) RIE[45]; (b, c) EBL[46-47]; (d-f) Nanoparticle self-assembly[48-50]; Scale bar: (e) 20 nm; (f) 200 nm. Figure reproduced with permission from: (a) ref. [45] © American Chemical Society; (b) ref. [46], (e) ref. [49] and (f) ref. [50] © under a Creative Commons Attribution-NonCommercial-No- Derivatives 4.0 International License; (c) ref. [47] © American Chemical Society; (d) ref. [48] © The American Association for the Advancement of Science
    Preparation of SERS microstructure by microcolumn self-assembly methods. (a) Self-assembly of gold nanopillars[55]; (b) Self-assembly of polymer-silver micropillars[56]; (c) Self-assembly of polymer-silver micropillars[57]; (d) Self-assembly of silver micropillars[58]; (e) Self-assembly of polymer-gold micropillars[59]. Figure reproduced with permission from: (a) ref. [55] and (e) ref. [59] © American Chemical Society; (b) ref. [56], (c) ref. [57] and (d) ref. [58] © Wiley
    Femtosecond two-photon reduction to prepare SERS substrates. (a) Two-photon reduction principle[70]; (b)Two-photon reduced silver microwire[71]; Scale bar: (b) 10 μm; (e) 1 μm. Figure reproduced with permission from: (a) ref. [70], (b) ref. [71], (c) ref. [74] and (e) ref. [71] © Wiley; (d) ref. [72] © The Royal Society of Chemistry
    Femtosecond laser cutting metal to prepare SERS substrate. (a) Femtosecond laser directly ablated metal surface forming nanostructure principle [80]; (b) Ag periodic surface[91]; (c) Superhydrophilic - superhydrophobic patterned substrate structures were prepared directly on copper surface [30]; (d) S-Ag-Ar substrate[92]; (e) Titanium alloy SERS substrate[93]. Figure reproduced with permission from: (a) ref. [80] © Elsevier; (b) ref. [91], (c) ref. [30] and (d) ref. [92] © Elsevier; (e) ref. [93] © under a Creative Commons Attribution-NonCommercial-No- Derivatives 4.0 International License
    Femtosecond laser cutting-sputtering to prepare a SERS substrate. (a) Large area SERS substrate[105]; (b) Flexible transparent SERS substrate[31]; (c) Glass SERS substrate[106]; (d) Hydrophobic-superhydrophobic SERS substrate[107]; (e) Superhydrophobic-hydrophilic SERS substrate[108] . Figure reproduced with permission from: (a) ref. [108], (b) ref. [31] and (c) ref. [106] © Elsevier; (d) ref. [107] © BioMed Central Ltd unless otherwise stated; (e) ref. [108] © American Chemical Society
    Two-photon direct writing combined metal evaporation. (a, b) 3D SERS structure of fiber surface [121-122]. Figure reproduced with permission from: (a) ref. [121] © under a Creative Commons Attribution-NonCommercial-No-Derivatives 4.0 International License; (b) ref. [122] © Wiley
    Femtosecond laser processing capillary self-assembly to prepare SERS substrate. (a) Capillary force self-assembly[126]; (b) Three-dimensional SERS structure based on capillary force self-assembly microchannels[7]. Figure reproduced with permission from: (a) ref. [126] © American Chemical Society; (b) ref. [7] © Wiley
    • Table 1. Comparison of four methods for processing SERS substrates by femtosecond laser

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      Table 1. Comparison of four methods for processing SERS substrates by femtosecond laser

      基底类型及维度微纳结构分析物检测浓度下限/mol增强因子特殊基底参考文献
      双光子还原金属—-三维银微花阵列4-AP10−101×108封闭微通道[71]
      银钯纳米颗粒R6G10−92.6×108封闭微通道[73]
      银纳米颗粒CV10−13/封闭微通道[74]
      粗糙银纳米结构R6G10−91×107光纤端面[78]
      飞秒激光切割金属—二维金纳米颗粒R6G10−92.4×108金板[94]
      铜微粒和粒子团R6G10−142.09×1014铜板[30]
      银微粒和粒子团R6G10−85.3×1014银板[92]
      钛合金纳米颗粒R6G10−117.85×105钛合金[97]
      飞秒激光切割-溅射—二维金铂纳米颗粒R6G10−68.46×107[105]
      银纳米颗粒R6G10−125.6×107柔性FEP膜[31]
      银纳米颗粒R6G/2×105玻璃[106]
      金纳米颗粒R6G10−6/PTFE[117]
      银纳米颗粒R6G10−175.19×1013铜箔[109]
      飞秒激光3D打印—三维金纳米颗粒水晶紫10−6/光纤端面[121]
      金纳米颗粒R6G10−73×103光纤端面[122]
      金纳米颗粒R6G10−68×107开放微通道[7]
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    Zhidong Yin, Caiding Ni, Sizhu Wu, Zhaoxin Lao. Femtosecond laser direct writing processing of SERS substrates and applications[J]. Opto-Electronic Engineering, 2023, 50(3): 220322

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    Paper Information

    Category: Article

    Received: Nov. 30, 2022

    Accepted: Feb. 6, 2023

    Published Online: May. 4, 2023

    The Author Email:

    DOI:10.12086/oee.2023.220322

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