Acta Optica Sinica, Volume. 36, Issue 5, 522004(2016)
Study on Bionic Moth-Eye Antireflective Cylindrical Microstructure on Germanium Substrate
[1] [1] Cao Yu, Zhang Jianjun, Li Tianwei, et al.. Optimization of longitudinal structure of intrinsic layer in microcrystalline silicon germanium solar cell[J]. Acta Physica Sinica, 2013, 62(3): 036102.
[2] [2] Shen Xiangwei, Liu Zhengtang, Lu Hongcheng, et al.. Investigation on technics and property of broadband infrared antire-flective sub-wavelength structure prepared by RIE on Ge substrate[J]. Mechanical Science and Technology for Aerospace Engineering, 2009, 28(10): 1375-1378.
[4] [4] Gao Yongfeng, Zhao Qionghua, Xu Xiaofang, et al.. Research on reflection properties of silicon based solar cells with parabolic cone array structure[J]. Chinese J Lasers, 2015, 42(8): 0808004.
[5] [5] Bernhard C G, Miller W H. A corneal nipple pattern iniInsect compound eyes[J]. Acta Physiologica Scandinavica, 1962, 56(3-4): 385-386.
[6] [6] Cui Zheng. Micro-nanofabrication technologies and applications[M]. Beijing: Higher Education Press, 2009: 321-335.
[7] [7] Sun C H, Jiang P, Jiang B. Broadband moth-eye antireflection coatings on silicon[J]. Applied Physics Letters, 2008, 92(6): 061112.
[8] [8] Zhang Z, Wang Z, Wang D, et al.. Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography[J]. Journal of Laser Applications, 2014, 26(1): 012010.
[9] [9] Chen Q, Hubbard G, Shields P A, et al.. Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting[J]. Applied Physics Letters, 2009, 94(26): 263118.
[10] [10] Xie Changqing, Zhu Xiaoli, Niu Jiebin, et al.. Micro-and nano-metal structures fabrication technology and applications[J]. Acta Optica Sinica, 2011, 31(9): 0900128.
[11] [11] Lü Xiaozhan, Ji Lingfei, Wu Yan, et al.. Fabrication of high performance anti-reflection silicon surface by picosecond laser scanning irradiation with chemical corrosion[J]. Chinese J Lasers, 2015, 42(4): 0403006.
[12] [12] Fan Peixun, Long Jiangyou, Jiang Dafa, et al.. Study on ultrafast laser fabrication of UV-FIR ultra-broad-band antireflection surface micro-nano structures and their properties[J]. Chinese J Lasers, 2015, 42(8): 0806005.
[14] [14] Moharam M G, Gaylord T K. Rigorous coupled-wave analysis of planar-grating diffraction[J]. Journal of the Optical Society of America, 1981, 71(7): 811-818.
[15] [15] Moharam M G, Grann E B, Pommet D A, et al.. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. Journal of the Optical Society of America A, 1995, 12(5): 1068-1076.
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Dong Tingting, Fu Yuegang, Chen Chi, Zhang Lei, Ma Chenhao. Study on Bionic Moth-Eye Antireflective Cylindrical Microstructure on Germanium Substrate[J]. Acta Optica Sinica, 2016, 36(5): 522004
Category: Optical Design and Fabrication
Received: Dec. 3, 2015
Accepted: --
Published Online: Apr. 26, 2016
The Author Email: Tingting Dong (dong_tingting_good@126.com)