Researching | Design and Analysis on Multi-points Flexible Supporting Structure of Large-aperture Lens

Opto-Electronic Engineering, Volume. 42, Issue 5, 88(2015)

Design and Analysis on Multi-points Flexible Supporting Structure of Large-aperture Lens

MA Lei1,*... CAO Diansheng2 and LIU Chengzhi1 |Show fewer author(s)

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¹[in Chinese]

²[in Chinese]

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References(2)

[8] [8] Watson D C, Novak W T.Kinematic lens mounting with distributed support and radial flexure: US Patent, 3239924[P].2003-12-25.

[9] [9] Soduh Y.Correction Member, Retainer, Exposure Apparatus, and Device Fabrication Method: US Patent, 6909493[P].2003-03-14.

CLP Journals

[1] CAO Yu-yan, WANG Zhi-chen, ZHOU Chao, FAN Lei, HAN Xi-da, ZHANG Yao-zu. General modeling and optimal design of flexure supporting structure for optical components[J]. Optics and Precision Engineering, 2016, 24(11): 2792

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MA Lei, CAO Diansheng, LIU Chengzhi. Design and Analysis on Multi-points Flexible Supporting Structure of Large-aperture Lens[J]. Opto-Electronic Engineering, 2015, 42(5): 88

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Received: May. 14, 2014

Accepted: --

Published Online: Sep. 8, 2015

The Author Email: Lei MA (mal@cho.ac.cn)

DOI:10.3969/j.issn.1003-501x.2015.05.015

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology