Opto-Electronic Engineering, Volume. 42, Issue 5, 88(2015)

Design and Analysis on Multi-points Flexible Supporting Structure of Large-aperture Lens

MA Lei1,*... CAO Diansheng2 and LIU Chengzhi1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    The surface-profile precision of lens is a main factor which influences the performance of the optical system.There are three main reasons which influence the lens surface-profile most, and they are the supporting structure, gravity and thermal load.In order to achieve the goal of getting high surface-profile precision of the lens (Φ>200 mm), a new multi-points flexible supporting structure is designed.Then, the influence of gravity and thermal load with the designed structure is analyzed.The results are as follows: for the deformation caused by gravity, the surface root-mean-square (RMS) value is 6.78 nm and 3.46 nm for the upper and lower surface respectively; for the deformation caused by thermal load, the surface (RMS) value is 8.30 nm and 5.57 nm for the upper and lower surface respectively.The designed structure with multi-point flexible support can effectively reduce the influence of precision loss which is caused by gravity and thermal load, and meet the requirements of high surface-profile precision of large-aperture lens for transmission-type optical system(RMS<λ/50, λ=632.8 nm).

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    MA Lei, CAO Diansheng, LIU Chengzhi. Design and Analysis on Multi-points Flexible Supporting Structure of Large-aperture Lens[J]. Opto-Electronic Engineering, 2015, 42(5): 88

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    Paper Information

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    Received: May. 14, 2014

    Accepted: --

    Published Online: Sep. 8, 2015

    The Author Email: Lei MA (mal@cho.ac.cn)

    DOI:10.3969/j.issn.1003-501x.2015.05.015

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