[1] [1] XU L W. Research on ultra-precision machining technology of micro-lens arrays ［D］. Harbin: Harbin Institute of Technology, 2015. (in Chinese)

[2] [2] XIE J, JIANG Y N, LU K, et al.. A rapid hot embossing of micro-arch array LGP and micro-optics application ［J］. Opt. Precision Eng., 2017, 25(9): 2421-2427. (in Chinese)

[3] [3] MENG F F, BU J. Design and fabrication of high filling rate micro-lens array in integrated imaging system ［J］. Opt. Precision Eng., 2017, 25(8): 2130-2138. (in Chinese)

[4] [4] ZHU X CH, WU F, CAO X D, et al.. Focal length measurement of micro-lens array based on the principle of hartmann-shack wave front detection ［J］. Opt. Precision Eng., 2013, 21(5): 1122-1128. (in Chinese)

[5] [5] CHEN Y L. Research on the key technology of ultra-precision machining and measuring for micro-structure array ［D］. Zhejiang: Zhejiang University, 2014. (in Chinese)

[6] [6] LU X D, TRUMPER D L.Spindle rotary position estimation for fast tool servo trajectory generation ［J］.International Journal of Machine Tools & Manufacture, 2007, 147: 1362-1367.

[7] [7] LI R B, ZHANG ZH H, WANG S J, et al.. Research on the machining technology of the micro-structure optical element tool holder for fast tool servo ［J］. Nanotechnology and precision Engineering, 2005, 3 (3): 216-221. (in Chinese)

[8] [8] YU D P, HONG S G, WONG Y S. Profile error compensation in fast tool servo diamond turning of micro-structured surfaces ［J］. International Journal of Machine Tools & Manufacture, 2012 (52): 13-23.

[9] [9] DING H Q, LUO SH M, CHANG X F, et al.. Research on the Path generation and optimization of the micro-lens array in the tool-cutting machining ［J］. Modern manufacturing engineering, 2016(7): 61-66. (in Chinese)

[10] [10] KONG L B, CHENG C F. Modeling and characterization of surface generation in fast tool servo machining of micro-lens arrays ［J］. Computers and Industrial Engineering, 2012(63): 957-970.

[11] [11] WANG G L, ZHU D CH, DAI Y F. The characteristics and path planning of fast tool servo machining for complex optical surfaces ［J］. Journal of Mechanical Engineering, 2011, 47 (15): 175-180. (in Chinese)

[12] [12] YANG Y. Research on micro-lens array milling ［D］. Beijing: Beijing Polytechnic University, 2015.

[13] [13] EKKARD B, LUTZ A. Ball-end milling of free-form surfaces for optical mold inserts ［C］. Proceedings of ASPE, 2004.

[14] [14] YAN J, ZHANG Z, KURIYAGAWA T, et al.. Fabricating micro-structured surface by using single crystalline diamond end mill ［J］. The International Journal of Advanced Manufacturing Technology. 2010, 51(9-12): 957-964.

[15] [15] CHEN C C, HUANG C Y, CHENG Y C, et al.. Ultra precision diamond milling of aspheric micro-lens arrays ［J］. Proc of SPIE, Vol. 8769 87693Q-1.

[16] [16] SEBASTIAN S, YI A Y, ANDREAS G, et al.. Diamond milling or turning for the fabrication of micro-lens arrays: comparing different diamond machining technologies ［J］. SPIE, 2011, 7927.

[17] [17] GUAN ZH L, TIE G P, YIN Z Q. Slow tool servo maching technology for optical array devices ［J］. Journal of National Defense University of Science and Technology, 2009, 31(4): 31-35+47. (in Chinese)

[18] [18] LI L, YI A Y. Development of a 3D artificial compound eye ［J］. Opt Express, 2010, 18(17): 18125-18137.

[19] [19] MUKAIDA M, YAN J W. Ductile machining of single-crystal silicon for micro-lens arrays by ultra-precision diamond turning using a slow tool servo ［J］. International Journal of Machine Tools & Manufacture, 2016,11: 004.

[20] [20] GUAN ZH L.Research on the ultra-precision maching technology of complex optical curved slow tool servo ［D］. Thesis of the University of Defense Science and Technology, 2010. (in Chinese)

[21] [21] LIU X L, ZHANG X D, FANG F Z, et al.. Influence of machining errors on form errors of micro-lens arrays in ultra-precision turning ［J］. International Journal of Machine Tools & Manufacture, 2015, 96: 80-93.