Opto-Electronic Advances, Volume. 5, Issue 8, 210029(2022)
Piezoresistive design for electronic skin: from fundamental to emerging applications
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Table 1. Summary on the parameters of current piezoresistive sensors.
View tableView in ArticleTable 1. Summary on the parameters of current piezoresistive sensors.
Structure Materials Sensor thickness Performance Flexible/ stretchable Application/ Force application Fabrication technique Ref. Sensitivity or GF Sensing range Response time Cyclic test GF: gauge factor (in some case just a single-point value). CNTs: carbon nanotubes; FKM: fluoroelastomer; SiC: silicon carbide; MWCNTs: multi-walled carbon nanotubes; Si: silicone; CB: carbon black; PDMS: polydimethylsiloxane; rGO: reduced graphene oxide; PS: polystyrene; VGr: vertical graphene; Ag NW: silver nanowire; PI: polyimide; Ag: silver; CSilkNM: carbonized silk nanofiber membranes; PPy: polypyrrole; EVOH: poly(vinyl alcohol-co-ethylene); POE: polyolefin elastomer; NiNWs: nickel nanowires; SWCNTs: single walled carbon nanotubes; Gr: graphene; ACNT: aligned carbon nanotub; Pt: platinum; PUA: polyurethane acrylate; PU: polyurethane; CNCs: cellulose nanocrystals; SiNPs: silica nanoparticles; TPU: thermoplastic polyurethane; CB: carbon black; PANI: polyaniline; PEDOT:PSS: poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate); WGF: wrinkled graphene film; and PVA: polyvinyl alcohol Simple “bulk” Simple “bulk” CNTs/FKM 100 ~ 300 mm 1.3 ×105 (ε = 100%) 232% ε 500 times Hysteresis (0~150% ε) Yes/Yes Strain/Human motion monitoring and Stretchable LEDs Internal melt-mixer ref. 50 Simple “bulk” SiC/Ecoflex 2.47×105 (ε = 2.5%) 0.05% ~ 5% ε 10000 times Consistent (0~4% ε) Yes/Yes Strain and pressure/Health and motion monitoring Laser direct writing ref. 65 Simple “bulk” rGO/PS ~ 60 mm 250 (ε = 1.05%) 100 ms 2000 times Consistent (0~0.7% ε) Yes/Yes Pressure/Human movement behaviors Laser scribe ref. 152 Simple “bulk” VGr/PDMS 72(ε = 20%) 22000 (ε = 100%) ε = 100% (Max) 1000 times Consistent (0~40% ε) Yes/Yes Strain/Human’s activities and timbres Deposition ref. 164 Fibre Fibre rGO-Ag NW@cotton fiber 4.23 kPa−1 (P =2.0 kPa) 220 ms Yes/Yes Pressure, bending and twisting/Finger motion and pulse monitoring Coating ref. 112 Nano fibre PI@Ag 1400 kPa−1 (5~100 kPa) 100 Pa ~ 100 kPa 200 ms 1000 times Consistent (5 kPa) Yes/Yes Pressure/Movement of body and temperature Electrospinning and in situ growth ref. 66 Nano fibre CSilkNM 0.63 ± 0.14 mm 34.47 kPa−1 (0.8 ~ 400 Pa) 0.8 Pa ~ 5 kPa 16.6 ms 10000 times Consistent (2.5 kPa) Yes/Yes Pressure/Human physiology monitoring and pressure distribution Electrospinning ref. 115 Fibre MWCNT/Si /EcoFlex 1.35 mm 1378 (ε=330%) 50% ~ 300% ε 295ms 10000 times Consistent (0~1000% ε) Yes/Yes Strain, bending and torsion /Human motion detection Wet spinning ref. 122 Nano fibre PPy/EVOH/ POE ~ 70 μm 2.83 kPa−1 (0 ~17 kPa) Upper limit 80 kPa 3 ms 4500 times Consistent (0~10 kPa) Yes/Yes Pressure/Large area pressure sensing Direct melt extrusion ref. 171 Surface structure Micro-dome rGO@NiNWs/ EcoFlex 1302.1 kPa−1 (0 ~ 2.5 kPa) 72 Pa ~ 20 kPa 6 ms 20000 times Consistent Yes/Yes Pressure/Health and motion monitoring Hot embossing ref. 80 Pyramid SWCNTs/ PDMS ~ 700 mm 8655.6 kPa−1 (400 ~ 800 Pa) Lower limit 7.3 Pa 4 ms 10000 times Consistent Yes/No Pressure/Health care Photolithography ref. 91 Pyramid PDMS/Carbon ~ 1 mm −2.5 kPa−1 (0 ~ 160 Pa) 15 Pa ~ 9 kPa ~20 ms Yes/No Pressure/Human movement behaviors Laser ref. 7 Hierarchical PDMS/Gr ~ 1 mm 1.2 kPa−1 (0.2 ~ 25 kPa) 5 Pa ~12 kPa 1000 times Consistent (1, 5, and 10 kPa) Yes/No Pressure /Human movement behaviors and voice recognition Soft lithography ref. 98 Micro-papillae Cu - Ag NWs/ PDMS ~ 1 mm 1.35 kPa−1 (0 ~ 2.0 kPa) 2 Pa ~ 20 kPa 36 ms 5000 times Consistent (0 ~2 kPa) Yes/No Pressure/Human physiology monitoring Soft lithography ref. 99 Hierarchical ACNT/Gr/ PDMS ~ 500 mm 19.8 kPa−1 (0.6 ~ 300 Pa) 0.6 Pa ~ 5.8 kPa 16.7 ms 35000 times Consistent (0~ 150 Pa) Yes/No Pressure, bending and torsional/Voice recognition Soft lithography ref. 100 Surface structure Crack Pt/PUA ~ 10 mm 2, 000 (ε = 2%) Yes/Yes Strain/Human movement behaviors and voice recognition Depositing/Stretching ref. 15 Crack Gold/PDMS 100 μm 200 (ε <0.5) 1000 (0.5% < ε < 0.7%) 5000 (0.7% < ε < 1%) 2% ε Yes/Yes Strain and pressure/Human physiology monitoring and sound vibrations Depositing/ Stretching ref. 104 Skin Texture CNTs/PDMS 2.08 kPa−1 (0.12 kPa) 50 ms 8000 times Consistent Yes/Yes Pressure/Human movement behaviors 3D-printing ref. 144 Papillae SWNT- MXene 11.47 kPa−1 (13 Pa ~ 0.77 kPa) (13 Pa ~ 10 kPa) 20 ms 10000 times Consistent (0~ 1 kPa) Yes/No Voice recognition (different volumes)/Pressure Etching and exfoliation ref. 162 Cracks rGO/PDMS ~ 300 μm 8699 (0.8 ~ 1.0% ε) 0.000064% (Mim) 107 ms 1000 times Consistent (0~0.35% ε) Yes/Yes Anti-interference voice recognition/Pressure Femtosecond laser direct writing ref. 165 Porous Porous PU/Liquid metal > 25 202 ms Yes/Yes Pressure/Electronic protection foam for transportation Coating ref. 46 Porous Mxenes /rGO 22.56 kPa−1 (1 kPa ~ 3.5 kPa) Lower limit 10 Pa <200 ms 1000 times Consistent (0~ 0.81 kPa) Yes/Yes Pressure/Human physiology monitoring and voice recognition Ice - template freezin ref. 68 Multilayer Mxenes/CNCs 114.6 kPa −1 (0.05 ~ 10 kPa) Lower limit 1.0 Pa 189 ms 2000 times Consistent (0~50% ε) Yes/Yes Pressure/Human physiology monitoring and voice recognition Directional freezing ref. 127 Porous Gr/PDMS 0.09 kPa−1 (0 ~ 1000 kPa) Upper limit 2000 kPa 100 ms Yes/Yes Pressure/Human physiology and motion monitoring Sacrificial template ref. 131 Porous Gr/PDMS ~0.3 mm 15.9 kPa−1 (0 ~ 60 kPa) 1.2 ms Yes/Yes Pressure and bending/Human physiology monitoring and intelligent robots Sacrificial template ref. 82 Porous CNTs/ SiNPs/ Si elastomer polymer 9.5 mm 0.096 kPa−1 (0 ~ 175 kPa) 10000 times Consistent (0~ 20 kPa) Yes/No Pressure/Human movement behaviors and intelligent robots 3D - printing ref. 145 Porous TPU/CB 5.54 kPa−1 (10 Pa ~ 800 kPa) 10 Pa ~ 800 kPa 20 ms 10000 times Consistent (40~200 kPa) Yes/No Pressure/Human physiology monitoring and voice recognition 3D - printing ref. 147 Porous TPU/CB 1.12 kPa−1 (20 Pa ~ 60 kPa) 20 Pa ~ 1.2 MPa 15 ms 10000 times Consistent (0~ 30 kPa) Yes/Yes Pressure/Human health and intelligent robots Sacrificial template ref. 153 Porous Multilayer Gr/Ecoflex 4.68 kPa−1 (0 ~ 150 kPa) 11.09 kPa−1 (150 ~ 200 kPa) Upper limit 200 kPa 1000 times Consistent (0~ 200 kPa) Yes/Yes Pressure/Physiological signal detection Laser scribe ref. 159 Multilayer Ti3C2 -MXene/PI 180.1 ~ 94.8 (0.19 ~ 0.82% ε) 30 ms 4000 times Consistent (0~ 7.5 kPa) Yes/Yes Pressure and strain/Human’s activities Etching ref. 160 Multilayer GO/Gr 0.032 kPa−1 (< 1 kPa) 8000 times Consistent Yes/Yes Human computer interaction/Pressure Ultrasonic ref. 169 Combined structures Hybrid AgNWs/ PDMS 128.29 kPa−1 (0 ~ 200 Pa) 1.28 kPa−1 (0.2 ~ 10 kPa) 2.5 Pa ~ 8 0 kPa <100 ms 10000 times Consistent (0~ 10 kPa) Yes/No Pressure/Human physiology monitoring and voice recognition Laser etching ref. 86 Textured@Porous CNTs/PDMS ~ 1 mm 83.9 kPa −1 (<140 Pa) 0.5 Pa ~ 10 kPa 170 ms 29000 times Consistent Yes/No Pressure/Human physiology monitoring and voice recognition Soft lithography/ sacrificial template ref. 106 Conical frustum-like structures Ag/PDMS 259.32 kPa −1 (0.36 Pa ~ 2.5 kPa) 0.36 Pa - 54 kPa 200 μs 1000 times Consistent (0~ 0.47 kPa) Yes/No Pressure/Health monitoring and intelligent robots Lithography/Deposition ref. 107 Crack @Porous PANI/PDMS ~ 300 mm ~0.055 kPa−1 (4 Pa ~ 5 kPa) 10 (ε = 25%) Lower limit 4 Pa 60 ms 500 times Hysteresis (0~5% ε) Yes/Yes Pressure, strain, shear and torsion/Human movement behaviors Sacrificial template /Stretching ref. 132 Crack @Porous Gold@PU 59 ~ 122 Pa−1 (0 ~ 14.2 kPa) Lower limit 0.568 Pa 9 ms 1000 times Consistent (0~45% ε) Yes/Yes Pressure/Voice recognition and vehicle speed calculation Ion sputtering/ Compress ref. 134 Others Sandwich PEDOT:PSS/ AgNWs/ PDMS 1 mm 8.0 (ε = 40%) 50% ε (Max) 300 times Consistent (0~30% ε) Yes/Yes Strain/Finger motions Transfer - printing technique ref. 74 Sandwich WGF/PVA/PI 4.52kPa−1 (0 ~ 3 kPa) 28.34kPa−1 (3 ~ 10 kPa) 2.24 Pa ~14 kPa 87 ms 6000 times Consistent Yes/Yes Pressure/Human movement behaviors Electrospinning and ink - jet print ref. 117
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Fang Zhong, Wei Hu, Peining Zhu, Han Wang, Chao Ma, Nan Lin, Zuyong Wang. Piezoresistive design for electronic skin: from fundamental to emerging applications[J]. Opto-Electronic Advances, 2022, 5(8): 210029
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Category: Research Articles
Received: May. 1, 2021
Accepted: Jul. 24, 2021
Published Online: Aug. 19, 2022
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