Infrared and Laser Engineering, Volume. 50, Issue 11, 20210036(2021)
Distribution characteristics of metal film eruption induced by nanosecond pulse laser
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Fig. 1. Schematic of experimental equipment. (a) LIDT test system with pump-probe technology; (b) A small vacuum system
Fig. 2. EDS measurements of 1 µm Al layer embedded in different depths of SiO2 film. The horizontal coordinate is the thickness of the SiO2 film layer, and the ordinate is the proportion of the quality of Al elements obtained by EDS. The measuring area is 50 μm×100 μm, the scanning time is 25 s, and the electron beam energy is 10 keV
Fig. 3. Distribution characteristics of Al particles in atmospheric and vacuum environments under different laser fluences
Fig. 4. Damage morphology of Al film deposited by electron beam evaporation
Fig. 5. Transient ejection characteristics of Al film at 90 ns in different environments captured by pump-probe image technology. (a) Atmospheric environment; (b) Vacuum environment
Fig. 6. Transient image of (a) Al and (b) W film ejection in 90 ns under vacuum environment
Fig. 7. Distribution characteristics of Al and W element on the receiving plate in atmospheric and vacuum environments
Table 1. Number of Al particles received by the receiving plate under different conditions
View tableView in ArticleTable 1. Number of Al particles received by the receiving plate under different conditions
Environment Laser fluence/J·cm−2 Total ejected particles Total received particles Percentage of reception Atmosphere 33 1.2481×1016 7.2583×1015 58.16% 42 1.3814×1016 7.2847×1015 52.73% 50 1.9798×1016 1.0892×1016 55.01% Vacuum 33 1.2011×1016 4.8924×1015 40.73% 42 1.4448×1016 5.6541×1015 39.13% 50 2.0198×1016 7.3754×1015 36.52%
Table 2. Number of Al and W particles received by the receiving plate under different conditions
View tableView in ArticleTable 2. Number of Al and W particles received by the receiving plate under different conditions
Environment Fluence/J·cm−2 Element Total ejected particles Total received particles Percentage of reception Atmosphere 33 Al 1.39428×1016 9.04330008×1015 64.86% W 1.09506×1016 2.28100998×1015 20.83% Vacuum 33 Al 1.34463×1016 7.80557715×1015 58.05% W 8.71092×1015 1.965183552×1015 22.56%
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Bin Ma, Jiaqi Han, Ke Wang, Qiushi Huang, Hongfei Jiao, Shuang Guan. Distribution characteristics of metal film eruption induced by nanosecond pulse laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20210036
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Received: Jan. 13, 2021
Accepted: --
Published Online: Dec. 7, 2021
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