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Opto-Electronic Engineering, Volume. 43, Issue 1, 55(2016)

All-reflective Broadband Spectroscopic Imaging Ellipsometer

JIANG Chunguang1...2,*, CHEN Yaqin2, LIU Tao2, XIONG Wei2, LI Guoguang2 and JI Feng1 |Show fewer author(s)
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    JIANG Chunguang, CHEN Yaqin, LIU Tao, XIONG Wei, LI Guoguang, JI Feng. All-reflective Broadband Spectroscopic Imaging Ellipsometer[J]. Opto-Electronic Engineering, 2016, 43(1): 55

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    Paper Information

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    Received: Jan. 28, 2015

    Accepted: --

    Published Online: Mar. 22, 2016

    The Author Email: Chunguang JIANG (chunguangj@163.com)

    DOI:10.3969/j.issn.1003-501x.2016.01.010

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology