Chinese Optics Letters, Volume. 11, Issue s1, S10701(2013)

Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing

Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, and Yuqi Jin
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Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701

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Paper Information

Category: Laser resistance coatings

Received: Jan. 4, 2013

Accepted: Jan. 26, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10701

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