Acta Optica Sinica, Volume. 24, Issue 8, 1146(2004)

Modeling of In-Situ Monitoring Curves During Development of Holographic Gratings

[in Chinese]1、*, [in Chinese]1, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(5)

    [1] [1] Li Lifeng. Application of Diffraction Theory to Analysis and Fabrication of Waveguide Gratings. Ph.D. dissertation,University of Arizona, USA,1988

    [2] [2] Lindau S. The groove profile formation of holographic gratings. Optical Acta, 1982, 29(10):1371~1381

    [3] [3] Britten J A, Boyd R D, Shore B W. In-situ end-point detection during development of submicrometer grating structures in photoresist. Opt. Engng., 1995, 34(2):474~479

    [4] [4] Smith H M. Holographic Recording Materials. Springer-Verlag, 1977

    [8] [8] Li L, Xu M, Stegeman G I et al.. Fabrication of photoresist masks for submicrometer surface relief gratings. Proc. SPIE, 1987, 835:72~82

    CLP Journals

    [1] Kong Peng, Tang Yuguo, Bayanheshig, Li Wenhao, Tan Xin, Cui Jinjiang. Compensation Effects between Parameter Errors of Flat-Field Holographic Concave Gratings[J]. Acta Optica Sinica, 2011, 31(7): 705001

    [2] Wang Wei, Bayanheshig, Pan Mingzhong, Song Ying, Li Wenhao. Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2017, 37(7): 722003

    [3] Kong Peng, Bayanheshig, Li Wenhao, Tang Yuguo. Modeling and In-Situ Monitoring of the Asymmetric Exposure and Development of Holographic Grating[J]. Acta Optica Sinica, 2010, 30(1): 65

    [4] Han Jian, Bayanheshig, Li Wenhao, Kong Peng. Wavefront Aberration Analysis of the Interference Image According to Different Axis Alignment Errors in the Grating Exposure System[J]. Acta Optica Sinica, 2012, 32(7): 705002

    [5] Xu Ting, LV Lijun. Optimization of Optical System of Extreme UltraViolet Spectrometer[J]. Acta Optica Sinica, 2010, 30(9): 2646

    [6] Jiang Shan, Bayanheshig, Song Ying, Pan Mingzhong, Li Wenhao. Effect of Measured Interference Fringe Period Error on Groove Profile of Grating Masks in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2014, 34(4): 405003

    [7] Wang Haibin, Liu Quan, Wu Jianhong. Fabrication of Convex Blazed Grating By Ar+ Ion-Beam Etching[J]. Acta Optica Sinica, 2011, 31(4): 405002

    [8] Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang. Groove Profile Prediction of Grating Masks in Scanning Beam Interference Lithography[J]. Acta Optica Sinica, 2018, 38(5): 0505001

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    [in Chinese], [in Chinese], [in Chinese]. Modeling of In-Situ Monitoring Curves During Development of Holographic Gratings[J]. Acta Optica Sinica, 2004, 24(8): 1146

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    Paper Information

    Category: Physical Optics

    Received: Jun. 5, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (zhaojs00@mails.tsinghua.edu.cn)

    DOI:

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