Optics and Precision Engineering, Volume. 19, Issue 1, 124(2011)
Al doped poly-Si micro-heater for thermomechanical fabrication of micro/nano structure
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RONG Hao, ZHAO Gang, CHU Jia-ru. Al doped poly-Si micro-heater for thermomechanical fabrication of micro/nano structure[J]. Optics and Precision Engineering, 2011, 19(1): 124
Paper Information
Received: Mar. 26, 2010
Accepted: --
Published Online: Mar. 28, 2011
The Author Email: Hao RONG (hrong@mail.ustc.edu.cn)
CSTR:32186.14.
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