Opto-Electronic Engineering, Volume. 32, Issue 7, 27(2005)
Mechanism of optical multiplication frequency effect on laser heterodyne interferometry
[1] [1] Attilio SACCONI,Gian Bartolo PICOTTO,Walter PASIN. The IMGC calibration setup for micro- displacement actuators[J]. IEEE Transactions on Instrumentation and Measurement,1999,48(2):483-487.
[2] [2] Deming SHU,Yufeng HAN,Thomas S. TOELLNER,et al. A Linear actuator system with 1-angstrom closed-loop control resolution and 50 milimeter travel range[J]. SPIE,2002,4771:72-90.
[5] [5] R. K. HEILMANN,P. T. KONKOLA,C. G. CHEN. Relativistic corrections in displacement measuring interferometry[J]. J. Vac. Sci. Technol,2000,18(6):3277-3281.
[6] [6] HOU W,WILKENING G. Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Prec Eng,1992,14(2):91-98.
[7] [7] DE FREITAS J M,PLAYER M A. Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry[J]. Meas Sci Tech,1993,4(10):1173-1176.
[8] [8] S. J. A. G. COSIJNS,H. HAITJEMA,P. H. J. SCHELLEKENS. Modeling and verifying nonlinearities in heterodyne displacement interferometry [J]. Prec Eng,2002,26(4):448-455.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Mechanism of optical multiplication frequency effect on laser heterodyne interferometry[J]. Opto-Electronic Engineering, 2005, 32(7): 27