Fig. 1. Working principle of PIB

Fig. 2. Stability and linearity verification results of PIB

Fig. 3. PIB removal resolution verification

Fig. 4. Comparison between simulated velocity distribution and actual velocity distribution of continuous ion beam

Fig. 5. Comparison of residuals after simulated processing with different gradient errors

Fig. 6. Error gradient curves after two processing methods

Fig. 7. Removal amount in the first stage of processing

Fig. 8. Ant Colony Algorithm Process

Fig. 9. Optimization results and processing path of ant colony algorithm

Fig. 10. Residual after a single processing using two processing methods with minimal removal amount

Fig. 11. Overall processing strategy

Fig. 12. Morphology of removal function under 5 mm beam diameter

Fig. 13. Convergence of the first stage processing

Fig. 14. Convergence of gradient error in the first stage

Fig. 15. Final processing result