Fig. 1. Electron spectrum for charging voltage of 60 kV

Fig. 2. Structure of moderated target

Fig. 3. Structure of thin target

Fig. 4. Diagram of computational model

Fig. 5. X-ray energy spectra with different thickness of organic glass of 50 μm (a) and 12 μm (b) tantalum respectively

Fig. 6. Curves of average photon energy

Fig. 7. Curves of photon energy conversion efficiency

Fig. 8. Calculation results in tantalum thickness of 10 μm: (a) X-ray spectra; (b) transmission electron spectra

Fig. 9. Curves of average photon energy

Fig. 10. Curves of photon energy conversion efficiency

Fig. 11. Surface parameters at an incident angle of 30° (a) photon spectra, and (b) electron spectra (color online)