Acta Photonica Sinica, Volume. 53, Issue 7, 0753302(2024)
Vacuum Ultraviolet Photodetectors with MSM Structure Based on Hexagonal Boron Nitride Films via Magnetron Sputtering （Invited）
Figures & Tables(9)
Fig. 1. Schematic diagram of the preparation process and testing system for hBN based detectors
Fig. 2. Physical images and AFM and SEM characterization of hBN thin films on 2-inch silicon substrates
Fig. 4. Schematic diagram of energy levels before and after metal hexagonal boron nitride contact
Fig. 5. I-V curves of UV detectors with different metal electrodes
Fig. 6. I-V curves of UV detectors with different hBN film thicknesses
Fig. 7. I-V curves of UV detectors with different cross finger electrode sizes
Table 1. Performance comparison of hBN based ultraviolet detectors
View tableView in ArticleTable 1. Performance comparison of hBN based ultraviolet detectors
Fabrication method Light/nm Dark current/pA Responsivity/mA·W-1 Specific detectivity/Jones Reference IBSD 212 10 0.1@20 V 2.4×108 ［ 10 ］IBSD 212 3.2 1.33@25 V 1.8×108 ［ 11 ］CVD 220 0.4 3.4@20 V 3.9×1010 ［ 18 ］CVD 210 0.9 5.45@5 V 8.62×109 ［ 19 ］MS 210 0.07 1.37×10-3@3 V 2.73×1010 ［ 21 ］MS 185 <3 pA 0.697@25 V
2.769@100 V
7.47×108
2.969×109
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Wannian FANG, Qiang LI, Qifan ZHANG, Ransheng CHEN, Jiaxing LI, Kangkang LIU, Feng YUN. Vacuum Ultraviolet Photodetectors with MSM Structure Based on Hexagonal Boron Nitride Films via Magnetron Sputtering （Invited）[J]. Acta Photonica Sinica, 2024, 53(7): 0753302
Paper Information
Category: Special Issue for Micro/Nanophotonics
Received: Mar. 24, 2024
Accepted: Apr. 27, 2024
Published Online: Aug. 12, 2024
The Author Email: LI Qiang (liqiang2014@mail.xjtu.edu.cn)
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