Nondestructive determination for the thickness of spin-coated polymer films by transparent coefficient

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Optics Letters, Volume. 3, Issue 0s, 290(2005)

[in Chinese]^1,2, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

Author Affiliations

¹Adavnced Photonics Center, Southeast University, Nanjing 210096

²Department of Electronics and Information, Huaiyin Institute of Technology, Huaian 223001

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References(7)

[1] [1] Z. Zhong, D. Shi, S. Yin, C. Liu, and W. Zhang, Semicond. Optoelectron. 25, 191 (2004).

[2] [2] H. Sirringhaus, N. Tessler, and R. H. RFriend, Science, 280, 1741 (1998).

[3] [3] Y. Acao, I. D. Parker, G. Yu, C. Zhang, and A. J. Heeger, Nature 397, 414 (1999).

[4] [4] Z. Zhong, C. Liu, S. Yin, and C. Xu, J. Huazhong Univ. Sci. Technol. (Nature Science Edition) 31, 37 (2003).

[5] [5] Z. Gu, G. Wang, P. Liang, and L. Hou, Chin. J. Lasers (in Chinese) 26, 902 (1999).

[6] [6] I.-T. Im, K.-S. Kim, and J. K. Cho, in Proceedings of Intel Symposium on Electronic Materials and Packaging 2001 (2001).

[7] [7] X. Liu, Q. Shen, Z. Cao, and Y. Chen, Acta Opt. Sin. (in Chinese) 20, 991 (2000).

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], "Nondestructive determination for the thickness of spin-coated polymer films by transparent coefficient," Chin.Opt.Lett. 3, 290 (2005)

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Paper Information

Received: --

Accepted: --

Published Online: Mar. 5, 2007

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology