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Laser & Optoelectronics Progress, Volume. 55, Issue 4, 042201(2018)

Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity

Zhongyu Chen1,2, Shaoyun Yin1, Xiuhui Sun1, Haibo Jiang1, and Chunlei Du1、*
Author Affiliations
  • 1 Integrated Optoelectronic Technology Center, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
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    References (21)
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    Figures & Tables(10)
    (a) Optical system of exposure machine; (b) smoothing principle of fly-eye lens

    Fig. 1. (a) Optical system of exposure machine; (b) smoothing principle of fly-eye lens

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    Target surface spot when the integrator is (a) lens and (b) spherical mirror, respectively

    Fig. 2. Target surface spot when the integrator is (a) lens and (b) spherical mirror, respectively

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    Target surface spot with parallel light incidence at single angle. (a) 0°; (b) 14°

    Fig. 3. Target surface spot with parallel light incidence at single angle. (a) 0°; (b) 14°

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    Light path diagram of exposure machine

    Fig. 4. Light path diagram of exposure machine

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    Illuminance distribution of target surface spot

    Fig. 5. Illuminance distribution of target surface spot

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    Sketch diagram of light and vector relation

    Fig. 6. Sketch diagram of light and vector relation

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    (a) Contour lines of free-form surface and sphere; (b) schematic diagram of free-form surface; (c) free-form surface lens array model

    Fig. 7. (a) Contour lines of free-form surface and sphere; (b) schematic diagram of free-form surface; (c) free-form surface lens array model

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    (a) Spot and (b) illuminance distribution curve of target surface with traditional fly-eye lens

    Fig. 8. (a) Spot and (b) illuminance distribution curve of target surface with traditional fly-eye lens

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    (a) Spot and (b) illuminance distribution curve of target surface with free-form surface fly-eye lens

    Fig. 9. (a) Spot and (b) illuminance distribution curve of target surface with free-form surface fly-eye lens

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    • Table 1. Relationship change between uniformity of target surface spot and beam center

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      Table 1. Relationship change between uniformity of target surface spot and beam center

      PositionUniformityPositionUniformityPositionUniformityPositionUniformityPositionUniformity
      (-40,-40)0.9568(-20,-40)0.9551(0,-40)0.9610(20,-40)0.9623(40,-40)0.9598
      (-40,-20)0.9609(-20,-20)0.9614(0,-20)0.9588(20,-20)0.9668(40,-20)0.9652
      (-40,0)0.9608(-20,0)0.9619(0,0)0.9574(20,0)0.9595(40,0)0.9593
      (-40,20)0.9623(-20,20)0.9575(0,20)0.9590(20,20)0.9616(40,20)0.9548
      (-40,40)0.9643(-20,40)0.9609(0,40)0.9613(20,40)0.9552(40,40)0.9557
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    Zhongyu Chen, Shaoyun Yin, Xiuhui Sun, Haibo Jiang, Chunlei Du. Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity[J]. Laser & Optoelectronics Progress, 2018, 55(4): 042201

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 10, 2017

    Accepted: --

    Published Online: Sep. 11, 2018

    The Author Email: Du Chunlei (cldu@cigit.ac.cn)

    DOI:10.3788/LOP55.042201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology