Laser & Optoelectronics Progress, Volume. 55, Issue 4, 042201(2018)
Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity
Parallel light exposure machine with large area is an important manufacturing equipment for electronic products such as printed circuit board (PCB), display panel, touch screen, and so on. Due to the use of non-axisymmetric Kohler illumination light path with fly-eye lens and a mirror, the uniformity of the exposure machine is only about 0.85, which cannot meet the needs of high-precision machining. Aiming at this problem, a fly-eye lens with free-form surface is proposed to replace traditional spherical fly-eye lens, and a free-form surface design method of high-uniformity fly-eye unit is established. The experimental results of ray tracing simulation analysis show that the exposure uniformity is improved to more than 0.91 by using the proposed method, which can meet the needs of high-precision machining. The designed fly-eye lens with free-form surface, which has continuous surface and can be machined by diamond turning, is expected to be widely used in the illumination path of parallel light exposure machine with large area.
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Zhongyu Chen, Shaoyun Yin, Xiuhui Sun, Haibo Jiang, Chunlei Du. Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity[J]. Laser & Optoelectronics Progress, 2018, 55(4): 042201
Category: Optical Design and Fabrication
Received: Oct. 10, 2017
Accepted: --
Published Online: Sep. 11, 2018
The Author Email: Du Chunlei (cldu@cigit.ac.cn)