Laser & Optoelectronics Progress, Volume. 55, Issue 4, 042201(2018)

Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity

Zhongyu Chen1,2, Shaoyun Yin1, Xiuhui Sun1, Haibo Jiang1, and Chunlei Du1、*
Author Affiliations
  • 1 Integrated Optoelectronic Technology Center, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
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    Parallel light exposure machine with large area is an important manufacturing equipment for electronic products such as printed circuit board (PCB), display panel, touch screen, and so on. Due to the use of non-axisymmetric Kohler illumination light path with fly-eye lens and a mirror, the uniformity of the exposure machine is only about 0.85, which cannot meet the needs of high-precision machining. Aiming at this problem, a fly-eye lens with free-form surface is proposed to replace traditional spherical fly-eye lens, and a free-form surface design method of high-uniformity fly-eye unit is established. The experimental results of ray tracing simulation analysis show that the exposure uniformity is improved to more than 0.91 by using the proposed method, which can meet the needs of high-precision machining. The designed fly-eye lens with free-form surface, which has continuous surface and can be machined by diamond turning, is expected to be widely used in the illumination path of parallel light exposure machine with large area.

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    Zhongyu Chen, Shaoyun Yin, Xiuhui Sun, Haibo Jiang, Chunlei Du. Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity[J]. Laser & Optoelectronics Progress, 2018, 55(4): 042201

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 10, 2017

    Accepted: --

    Published Online: Sep. 11, 2018

    The Author Email: Du Chunlei (cldu@cigit.ac.cn)

    DOI:10.3788/LOP55.042201

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