Acta Photonica Sinica, Volume. 42, Issue 7, 823(2013)

Comparison of Base-catalyzed Silica Antireflective Coatings Modified by Different Surface Treatments of Water-NH3 and/or Hexamethyldisilazane Vapors

HUO Yan-fang*... LUO Rong-hui and SU Yong-gang |Show fewer author(s)
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    References(16)

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    HUO Yan-fang, LUO Rong-hui, SU Yong-gang. Comparison of Base-catalyzed Silica Antireflective Coatings Modified by Different Surface Treatments of Water-NH3 and/or Hexamethyldisilazane Vapors[J]. Acta Photonica Sinica, 2013, 42(7): 823

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    Paper Information

    Received: Dec. 14, 2012

    Accepted: --

    Published Online: Jul. 16, 2013

    The Author Email: Yan-fang HUO (huoyanfangmm@163.com)

    DOI:10.3788/gzxb20134207.0823

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