Acta Photonica Sinica, Volume. 39, Issue 4, 600(2010)
Submicron-sized Optical Fabrication with DMD Based Lithography
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LU Jin-hong, XIE Xiang-sheng, ZHANG Pei-qing, ZHOU Jian-ying. Submicron-sized Optical Fabrication with DMD Based Lithography[J]. Acta Photonica Sinica, 2010, 39(4): 600
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