[1] [1] DANG S, AMIN O, SHIHADA B, et al. What should 6G be?［J］. Nat Electron, 2020, 3(1): 20-29.

[2] [2] TONOUCHI M. Cutting-edge terahertz technology［J］. Nat Photonics, 2007, 1(2): 97-105.

[3] [3] NAGATSUMA T, DUCOURNAU G, RENAUD C C. Advances in terahertz communications accelerated by photonics［J］. Nat Photonics, 2016, 10(6): 371-379.

[4] [4] AGHASI H, NAGHAVI S M H, TAVAKOLI TABA M, et al. Terahertz electronics: Application of wave propagation and nonlinear processes［J］. Appl Phys Rev, 2020, 7(2): 021302.

[6] [6] JIN M, YANG W H, WANG X H, et al. Growth and characterization of ZnTe single crystal via a novel Te flux vertical Bridgman method［J］. Rare Met, 2021, 40(4): 858-864.

[7] [7] SHALAEV V M. Optical negative-index metamaterials［J］. Nat Photonics, 2007, 1(1): 41-48.

[8] [8] GRBIC A, ELEFTHERIADES G V. Overcoming the diffraction limit with a planar left-handed transmission-line lens［J］. Phys Rev Lett, 2004, 92(11): 117403.

[9] [9] YU N, CAPASSO F. Flat optics with designer metasurfaces［J］. Nat Mater, 2014, 13(2): 139-150.

[10] [10] JIANG H L, PAN J, ZHOU W, et al. Fabrication and application of arrays related to two-dimensional materials［J］. Rare Met, 2022, 41(1): 262-286.

[12] [12] WANG Q, ZHANG X, XU Y, et al. A broadband metasurface-based terahertz flat-lens array［J］. Adv Opt Mater, 2015, 3(6): 779-785.

[13] [13] YUE F, WEN D, ZHANG C, et al. Multichannel polarization- controllable superpositions of orbital angular momentum states［J］. Adv Mater, 2017, 29(15): 1603838.

[14] [14] WEN Y, ZHOU J. Artificial nonlinearity generated from electromagnetic coupling metamolecule［J］. Phys Rev Lett, 2017, 118(16): 167401.

[15] [15] SHADRIVOV I V, KAPITANOVA P V, MASLOVSKI S I, et al. Metamaterials controlled with light［J］. Phys Rev Lett, 2012, 109(8): 083902.

[16] [16] ZHANG X G, TANG W X, JIANG W X, et al. Light-controllable digital coding metasurfaces［J］. Adv Sci, 2018, 5(11): 1801028.

[17] [17] CUI T J, QI M Q, WAN X, et al. Coding metamaterials, digital metamaterials and programmable metamaterials［J］. Light Sci Appl, 2014, 3(10): e218-e218.

[18] [18] RATNI B, DE LUSTRAC A, PIAU G P, et al. Active metasurface for reconfigurable reflectors［J］. Appl Phys A, 2018, 124(2): 104.

[19] [19] SINGH R, AZAD A K, JIA Q X, et al. Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates［J］. Opt Lett, 2011, 36(7): 1230-1232.

[20] [20] MAO M, LIANG Y, LIANG R, et al. Dynamically temperature-voltage controlled multifunctional device based on VO2 and graphene hybrid metamaterials: Perfect absorber and highly efficient polarization converter［J］. Nanomaterials, 2019, 9(8): 1101.

[21] [21] FU Y H, LIU A Q, ZHU W M, et al. A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators［J］. Adv Funct Mater, 2011, 21(18): 3589-3594.

[22] [22] BAI L, SONG G Y, JIANG W X, et al. Acoustic tunable metamaterials based on anisotropic unit cells［J］. Appl Phys Lett, 2019, 115(23): 231902.

[23] [23] BASUDEB S, CEDRIK M, THOMAS Z. Nonlinear optics in all-dielectric nanoantennas and metasurfaces: A review［J］. Adv Photonics, 2019, 1(2): 1-14.

[24] [24] RYBIN M V, KOSHELEV K L, SADRIEVA Z F, et al. High-$Q$ supercavity modes in subwavelength dielectric resonators［J］. Phys Rev Lett, 2017, 119(24): 243901.

[25] [25] ZHANG M, ZHANG F, LI M, et al. Highly efficient amplitude modulation of terahertz fano resonance based on Si photoactive substrate by low power continuous wave［J］. Adv Mater Technol, 2020, 5(12): 2000626.

[26] [26] YANG Y, WANG W, BOULESBAA A, et al. Nonlinear fano-resonant dielectric metasurfaces［J］. Nano Lett, 2015, 15(11): 7388-7393.

[27] [27] MIROSHNICHENKO A E, FLACH S, KIVSHAR Y S. Fano resonances in nanoscale structures［J］. Rev Mod Phys, 2010, 82(3): 2257-2298.

[28] [28] WANG Y, ZHOU C, HUO Y, et al. Efficient excitation and tuning of multi-fano resonances with high Q-factor in all-dielectric metasurfaces［J］. Nanomaterials, 2022, 12(13): 2292.

[29] [29] GU J, SINGH R, LIU X, et al. Active control of electromagnetically induced transparency analogue in terahertz metamaterials［J］. Nat Commun, 2012, 3(1): 1151.

[30] [30] MANJAPPA M, SRIVASTAVA Y K, CONG L, et al. Active photoswitching of sharp fano resonances in THz metadevices［J］. Adv Mater, 2017, 29(3): 1603355.

[31] [31] LOU J, XU X, HUANG Y, et al. Optically controlled ultrafast terahertz metadevices with ultralow pump threshold［J］. Small, 2021, 17(44): 2104275.

[32] [32] LIM W X, MANJAPPA M, SRIVASTAVA Y K, et al. Ultrafast all-optical switching of germanium-based flexible metaphotonic devices［J］. Adv Mater, 2018, 30(9): 1705331.

[33] [33] JIANG J, FANG R, HAN J, et al. Optical switching of terahertz wave based on asymmetric metamaterial structures［J］. Ferroelectrics, 2020, 568(1): 79-84.

[34] [34] LI Q, GUPTA M, ZHANG X, et al. Active control of asymmetric fano resonances with graphene-silicon-integrated terahertz metamaterials［J］. Adv Mater Technol, 2020, 5(2): 1900840.

[35] [35] SUN L J, SU H W, LIU Q Q, et al. A review on photocatalytic systems capable of synchronously utilizing photogenerated electrons and holes［J］. Rare Met, 2022, 41(7): 2387-2404.

[36] [36] JEONG J, GOLDFLAM M D, CAMPIONE S, et al. High quality factor toroidal resonances in dielectric metasurfaces［J］. ACS Photonics, 2020, 7(7): 1699-1707.

[37] [37] NAFTALY M, MILES R E. Terahertz time-domain spectroscopy of silicate glasses and the relationship to material properties［J］. J Appl Phys, 2007, 102(4): 043517.

[38] [38] WANG W, SRIVASTAVA Y K, GUPTA M, et al. Photoswitchable anapole metasurfaces［J］. Adv Opt Mater, 2022, 10(4): 2102284.

[39] [39] LINDEN S, ENKRICH C, WEGENER M, et al. Magnetic response of metamaterials at 100 Terahertz［J］. Science, 2004, 306(5700): 1351-1353.

[41] [41] SCHINKE C, CHRISTIAN PEEST P, SCHMIDT J, et al. Uncertainty analysis for the coefficient of band-to-band absorption of crystalline silicon［J］. AIP Adv, 2015, 5(6): 067168