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Acta Optica Sinica, Volume. 36, Issue 5, 512002(2016)

Nanoscale Focusing and Leveling Measurement Technology Based on Optical Spatial Split

Sun Yuwen1,2,3、*, Li Shiguang1,2,3, and Zong Mingcheng1,2
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    Sun Yuwen, Li Shiguang, Zong Mingcheng. Nanoscale Focusing and Leveling Measurement Technology Based on Optical Spatial Split[J]. Acta Optica Sinica, 2016, 36(5): 512002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 14, 2015

    Accepted: --

    Published Online: May. 3, 2016

    The Author Email: Yuwen Sun (sunyuwen@ime.ac.cn)

    DOI:10.3788/aos201636.0512002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology