Semiconductor Optoelectronics, Volume. 43, Issue 6, 1075(2022)

Design and Simulation of Bioinspired Flow Sensor Based on MEMS Technology

LU Jianxun1...2, ZHOU Nanyan1,2 and LIU Wu1 |Show fewer author(s)
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    LU Jianxun, ZHOU Nanyan, LIU Wu. Design and Simulation of Bioinspired Flow Sensor Based on MEMS Technology[J]. Semiconductor Optoelectronics, 2022, 43(6): 1075

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    Paper Information

    Special Issue:

    Received: Jun. 18, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022061802

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