Semiconductor Optoelectronics, Volume. 43, Issue 6, 1075(2022)
Design and Simulation of Bioinspired Flow Sensor Based on MEMS Technology
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LU Jianxun, ZHOU Nanyan, LIU Wu. Design and Simulation of Bioinspired Flow Sensor Based on MEMS Technology[J]. Semiconductor Optoelectronics, 2022, 43(6): 1075
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Received: Jun. 18, 2022
Accepted: --
Published Online: Jan. 27, 2023
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