A capacitive artificial hair sensor that enables two-dimensional wind velocity measurement was designed. The sensor detected flow velocity by differential capacitance, and the handle layer of wafer corresponding to the sensor motion structure was completely etched. The relationship between the differential capacitance of the sensor and the wind velocity was analyzed and obtained by multi-physics field simulation of fluid-solid-electrostatics field using finite element analysis software. With the theoretical accuracy of the capacitance sensor AD7746, the wind velocity sensitivity of the sensor is calculated to be 0.25mm/s. In addition, a process flow for the microfabrication of the sensor based on SOI wafer was designed.