Fig. 1. Structure component of fast steering mirror

Fig. 2. Structure of flexible support

Fig. 3. Structure and force diagram of flexible hinge

Fig. 4. Voice coil motor driving and load model

Fig. 5. Open loop control diagram of fast steering mirror

Fig. 6. Frequency response characteristics of the output force of voice coil motor to the position of mirror

Fig. 7. Open-loop frequency response characteristics

Fig. 8. Frequency response characteristics of closed loop control system

Fig. 9. Step response of closed loop control system

Fig. 10. Finite element analysis result of swing part

Fig. 11. Frequency response characteristic of motion axis

Fig. 12. Control signal

Fig. 13. Kinematics model of swing parts

Fig. 14. Output angle signal of mirror