[1] [1] CHONG Z Z, TOR S B, LOH N H, et al.. Acoustofluidic control of bubble size in microfluidic flow-focusing configuration ［J］. Lab on a Chip, 2015, 15(4): 996-999.

[2] [2] ZHANG L, YU X, YOU S, et al.. Highly sensitive microfluidic flow sensor based on aligned piezoelectric poly(vinylidene fluoride-trifluoroethylene) nanofibers ［J］. Applied Physics Letters, 2015, 107(24): 242901.

[3] [3] MORINI G L, YANG Y, CHALABI H, et al.. A critical review of the measurement techniques for the analysis of gas microflows through microchannels ［J］. Experimental Thermal and Fluid Science, 2011, 35(6): 849-865.

[4] [4] SCHULER G A, WOKAUN A, BCHI F N. Local online gas analysis in PEFC using tracer gas concepts ［J］. Journal of Power Sources, 2010, 195(6): 1647-1656.

[5] [5] KHADEM M, SHAMS M, HOSSAINPOUR S. Numerical simulation of roughness effects on flow and heat transfer in microchannels at slip flow regime ［J］. International Communications in Heat and Mass Transfer, 2009, 36(1): 69-77.

[6] [6] ZHANG L, YU X, YOU S, et al.. Highly sensitive microfluidic flow sensor based on aligned piezoelectric poly(vinylidene fluoride-trifluoroethylene) nanofibers ［J］. Applied Physics Letters, 2015, 107(24): 242901.

[7] [7] AGRAWAL A. A comprehensive review on gas flow in microchannels ［J］. International Journal of Micro-Nano Scale Transport, 2011, 2(1): 1-40.

[8] [8] HO C M, TAI Y C. Micro-electro-mechanical-systems(MEMS) and fluid flows ［J］. Annual Review of Fluid Mechanics, 1998, 30(1): 579-612.

[9] [9] ZHANG Z, ZHANG H, YE H. Pressure-driven flow in parallel-plate nanochannels ［J］. Applied Physics Letters, 2009, 95(15): 154101.

[10] [10] WERELEY S T, MEINHART C D. Recent advances in micro-particle image velocimetry ［J］. Annual Review of Fluid Mechanics, 2010, 42: 557-576.

[11] [11] NGUYEN N. Micromachined flow sensors ［J］. Flow Measurement and Instrumentation, 1997, 8(1): 7-16.

[12] [12] LNGE K, RAPP B E, RAPP M. Surface acoustic wave biosensors: a review ［J］. Analytical and Bioanalytical Chemistry, 2008, 391(5): 1509-1519.

[13] [13] WANG Y H, CHEN C P, CHANG C M, et al.. MEMS-based gas flow sensors ［J］. Microfluidics and Nanofluidics, 2009, 6(3): 333-346.

[14] [14] MATSUDA Y, MISAKI R, YAMAGUCHI H, et al.. Pressure-sensitive channel chip for visualization measurement of micro gas flows ［J］. Microfluidics and Nanofluidics, 2011, 11(4): 507-510.

[15] [15] WU C H, KANG D, CHEN P H, et al.. MEMS thermal flow sensors ［J］. Sensors and Actuators A: Physical, 2016, 241: 135-144.

[16] [16] QIAN M, NIU L, WANG Y, et al.. Measurement of flow velocity fields in small vessel-mimic phantoms and vessels of small animals using micro ultrasonic particle image velocimetry(micro-EPIV) ［J］. Physics in Medicine and Biology, 2010, 55(20): 6069.

[17] [17] LUCCHETTA D E, VITA F, FRANCESCANGELI D, et al.. Optical measurement of flow rate in a microfluidic channel ［J］. Microfluidics and Nanofluidics, 2016, 20(1).

[18] [18] VILARES R, HUNTER C, UGARTE I, et al.. Fabrication and testing of a SU-8 thermal flow sensor ［J］. Sensors and Actuators B: Chemical, 2010, 147(2): 411-417.

[19] [19] KUO J T, YU L, MENG E. Micromachined thermal flow sensors ［J］. Micromachines, 2012, 3(3): 550-573.

[20] [20] WU Y, DE LABACHELERIE M, BASTIEN F. Investigations on excitation and detection methods for Lamb wave sensors ［J］. Sensors and Actuators A: Physical, 2002, 100(2): 214-222.

[21] [21] JIA H, DUHAMEL R, MANCEAU J F, et al.. Improvement of Lamb waves sensors: Temperature sensitivity compensation ［J］. Sensors and Actuators A: Physical, 2005, 121(2): 321-326.

[22] [22] LI F, MANCEAU J F, WU Y, et al.. Measurements of evanescent wave in a sandwich Lamb wave sensor ［J］. Applied Physics Letters, 2008, 93(17): 174101.

[23] [23] LI F, WU Y, MANCEAU J F, et al.. Temperature compensation of lamb wave sensor by combined antisymmetric mode and symmetric mode ［J］. Applied Physics Letters, 2008, 92(7): 4101.

[24] [24] JIA H G, GUANG L L, LIU B. Different pressure microflow sensors based on Lamb waves ［J］. Opt. Precision Eng., 2009, 17(5): 1033-1038.(in Chinese)

[25] [25] ZHOU L, MANCEAU J F O, BASTIEN F O. Influence of gases on Lamb waves propagations in resonator ［J］. Applied Physics Letters, 2009, 95(22): 223505.

[26] [26] ZHOU L, WU Y, XUAN M, et al.. A multi-parameter decoupling method with a Lamb wave sensor for improving the selectivity of label-free liquid detection ［J］. Sensors(Basel), 2012, 12(8): 10369-80.

[27] [27] MIREA T, YANTCHEV V. Influence of liquid properties on the performance of S0-mode Lamb wave sensors: A theoretical analysis ［J］. Sensors and Actuators B: Chemical, 2015, 208: 212-219.

[28] [28] MIREA T, YANTCHEV V, OLIVARES J, et al.. Influence of liquid properties on the performance of S0-mode Lamb wave sensors Ⅱ: Experimental validation ［J］. Sensors and Actuators B: Chemical, 2016, 229: 331-337.

[29] [29] WILLBERG C, DUCZEK S, VIVAR-PEREZ J M, et al.. Simulation methods for guided wave-based structural health monitoring: a review ［J］. Applied Mechanics Reviews, 2015, 67(1): 010803.

[30] [30] MORONEY R, WHITE R, HOWE R. Microtransport induced by ultrasonic Lamb waves ［J］. Applied Physics Letters, 1991, 59(7): 774-776.

[31] [31] NGUYEN N, WHITE R. Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation ［J］. Sensors and Actuators A: Physical, 1999, 77(3): 229-236.

[32] [32] SAYAR E, FAROUK B. Acoustically generated flows in microchannel flexural plate wave sensors: Effects of compressibility ［J］. Sensors and Actuators A: Physical, 2011, 171(2): 317-323.

[33] [33] ZHOU L, MANCEAU J F, BASTIEN F. Interaction between gas flow and a Lamb waves based microsensor ［J］. Sensors and Actuators A: Physical, 2012, 181: 1-5.

[34] [34] OSBORNE M, HART S. Transmission, reflection, and guiding of an exponential pulse by a steel plate in water. I. Theory ［J］. The Journal of the Acoustical Society of America, 1945, 17(1): 1-18.