Fig. 1. Fig. ‍1　Micronano array composite structure of monocrystalline silicon

Fig. 2. Plasma plasmon oscillation principle of metal nanospheres^[11]

Fig. 3. Yee cellular network model

Fig. 4. Contour lines of absorptivity of silicon column array structure changing with L and G at different H values. (a) 800 nm; (b) 1100 nm

Fig. 5. Relationship between absorptivity of silicon gate composite structure after adding Ag nanospheres and silicon gate parameters

Fig. 6. Relationship between absorptivity of silicon gate composite structure after adding Ag nanospheres and Al₂O₃ buffer layer and H. (a)H=600 nm; (b)H=1000 nm; (c)H=1400 nm; (d)H=1800 nm

Fig. 7. Relationship between absorptivity of composite microstructures and L and G in different combination forms. （a） 500 nm； （b） 600 nm； （c） 700 nm； （d） 800 nm； （e） 900 nm； （f） 1000 nm

Fig. 8. Intensity distribution at different longitudinal sections. (a) In silicon plate; (b) y-z cross section; (c) x-z cross section