Fig. 1. 3D simulation diagram of WGM microcavity

Fig. 2. Precision turning of WGM microcavity

Fig. 3. Precision polishing of WGM microcavity

Fig. 4. Fabricated WGM microcavity

Fig. 5. Test results of microcavity sidewall morphology

Fig. 6. Photomicrographs（200^×）of microcavity surface

Fig. 7. Schematic diagram of microcavity Q factor measurement

Fig. 8. Test results of quality factor of WGM microcavity