Infrared and Laser Engineering, Volume. 46, Issue 9, 920004(2017)
Kinetic process and tracking control of MOEMS scanning mirror under external parameter excitation
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
Wang Xiaoyi, Wang Qi, Li Yunxi, Yang Yafei. Kinetic process and tracking control of MOEMS scanning mirror under external parameter excitation[J]. Infrared and Laser Engineering, 2017, 46(9): 920004
Paper Information
Category: 光电器件与微系统
Received: Jan. 7, 2017
Accepted: Feb. 10, 2017
Published Online: Nov. 17, 2017
The Author Email: Xiaoyi Wang (wangxiaoyi11@qq.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20