[1] [1] ZHANG D,CHANG C,ONO T,et al.A piezodriven XY-microstage for multiprobe nanorecording[J].Sensors and Actuators,2003,108(1-3):230-233.

[2] [2] YANG R,JOUANEH M,SCHWEIZER R.Design and characterization of a low-profile micropositioning stage[J].Precision Engineering,1996,18(1):20-29.

[4] [4] XU W,KING T.Flexure hinges for piezoactuator displacement amplifiers flexibility,accuracy,and stress consideration[J].Precision Engineering,1996,19(1):4 -10.

[6] [6] PAROS J M,WEISBORD L.How to design flexure hinges[J].Machine Design,1965:151-157.

[7] [7] JOUANEH M,YANG R.Modeling of flexure-hinge type lever mechanisms[J].Precision Engineering,2003,27(4):407-418.

[8] [8] WU Y F,ZHOU ZH Y.An XYθ mechanism actuated by one actuator[J].Mechanism and Machine Theory,2004,39(10):1101-1110.

[10] [10] ELMUSTAFA A A,LAGALLY M G.Flexural-hinge guided motion nanopositioner stage for precision machining:finite element simulations[J].Precision Engineering,2001,25(1):77-81.

[11] [11] ZETTL B,SZYSZKOWSKI W,ZHANG W J.Accurate low DOF modeling of a planar compliant mechanism with flexure hinges:the equivalent beam methodology[J].Precision Engineering,2005,29:237-245.