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Optics and Precision Engineering, Volume. 14, Issue 6, 1017(2006)

Design and analysis of a novel 3-DOF nanopositioning stage

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    [in Chinese], [in Chinese], [in Chinese]. Design and analysis of a novel 3-DOF nanopositioning stage[J]. Optics and Precision Engineering, 2006, 14(6): 1017

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    Received: Nov. 23, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology