[1] [1] Ning Y, Chen B, Jiang W H. Decoupling algorithm of a double-layer bimorph deformable mirror: analysis and experimental test [J]. Appl Opt, 2009, 48: 3154-3159.

[2] [2] Zhou Hong. Reserch on bimorph deformable mirror and its application in adaptive optics[D]. Beijing: University of Chinese Academy of Sciences, 2013. (in Chinese)

[3] [3] Gerber M, Graf T, Kudryashov A. Generation of custom modes in a Nd:YAG laser with a semipassive bimorph adaptive mirror [J]. Appl Physics B, 2006, 83: 43-50.

[4] [4] Rausch P, Verpoort S, Wittrock U, et al. Unimorph deformable mirror for space telescope: design and manufacturing[J]. Opt Express, 2015, 23(15): 19469-19477.

[5] [5] Dai Y, Zhao L, Zhang Y D. Adaptive optics vision simulation and perceptual learning system based on a 35-element bimorph deformable mirror [J]. Appl Opt, 2015, 54: 979-985.

[7] [7] Cui Yuguo, Sun Baoyuan, Dong Weijie, et al. Causes for hysteresis and nonlinearity of piezoelectric ceramic actuators [J]. Optics and Precision Engineering, 2003, 11(3): 270-275. (in Chinese)

[8] [8] Zhu Wei. Hysteretic modeling, linearization and control method for piezoelectric ceramic stack actuators and piezoelectric ceramic stack actuators′ based systems [D]. Chongqing: Chongqing University, 2012. (in Chinese)

[9] [9] Wang Geng. Study on correction of nonlinearity of piezoelectric actuator [D]. Beijing: University of Chinese Academy of Sciences, 2013. (in Chinese)

[10] [10] Wang Geng, Guan Chunlin, Zhang Xiaojun, et al. Design and control of miniature piezoelectric actuator based on strain gauge sensor [J]. Optics and Precision Engineering, 2013, 21(3): 709-716. (in Chinese)

[11] [11] Wang Shifan. Eleetrostrietive effects in relaxed ferroelectric PZT:La [J]. Piezoelectrics & Acoustoopics, 1982(5): 43-50. (in Chinese)

[12] [12] Wu Weibin, Dai Yifan, Guan Chaoliang, et al. Optimization design for transversal piezoelectric effect deformable mirror [J]. Infrared and Laser Engineering, 2016, 45(8): 0818003. (in Chinese)

[13] [13] Xu Zuqian. Piezoelectric effect and electrostriction in ferrorelectric ceramics [J]. Piezoelectrics & Acoustoopics, 1982(4): 1-5. (in Chinese)

[14] [14] Zhou Changrong, Liu Xinyu, Jiang Minhong, et al. Effect of BiCoO3 on piezoelectric properties and depolarization temperature of BNT-BKT piezoelectric ceramics [J]. Journal of Central South University (Science and Technology), 2010, 41(5): 1796-1800. (in Chinese)

[15] [15] Mao Jianbo, Yi Maoxiang. Research on the polarization technology of PZT piezoelectric ceramic [J]. Piezoelectrics & Acoustoopics, 2006, 28(6): 736-740. (in Chinese)

[17] [17] Du Kexiang, Pan Zhongyin, Duan Yaling. Polaring principle of piezoceramic and its test method[J]. Petroleum Instruments, 2010, 24(4): 34-36. (in Chinese)

[18] [18] Hu Liangliang, Mi Fengwen, Jin Weiqi, et al. Open loop control of fast steering mirror based on PI inverse model [J]. Infrared and Laser Engineering, 2017, 46(8): 0818001. (in Chinese)