Fig. 1. 有效折射率随波导宽度变化Effective refractive index varies with waveguide width

Fig. 2. Schematic pattern and experimental flow diagram [Fig.(g)~(i)corresponds to Fig.(d)~(f)side view (only shows tip changes)]

Fig. 3. 不同回流温度、回流时间对光刻胶的影响(每组显示锥形尖端部和末尾部的分层现象)Effect of different reflow temperatures and reflow times on the photoresist (Each group shows the stratification of the tapered tip and tail)

Fig. 4. 绝热锥形SEM图像Adiabaticcone SEM image