Acta Optica Sinica, Volume. 35, Issue 6, 612007(2015)
Optimized Analysis of Random Point Array Illumination Source for Nanometer Accuracy Wavefront Error Testing
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Lu Zengxiong, Qi Yuejing, Qi Wei, Su Jiani, Peng Zhuojun. Optimized Analysis of Random Point Array Illumination Source for Nanometer Accuracy Wavefront Error Testing[J]. Acta Optica Sinica, 2015, 35(6): 612007
Category: Instrumentation, Measurement and Metrology
Received: Jan. 20, 2015
Accepted: --
Published Online: May. 28, 2015
The Author Email: Zengxiong Lu (luzengxiong@aoe.ac.cn)