Acta Photonica Sinica, Volume. 41, Issue 6, 695(2012)

Structural and Optical Properties of Zn3N2 Films Prepared by Magnetron Sputtering in NH3Ar Mixture Gases

LI Hongguang*
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    LI Hongguang. Structural and Optical Properties of Zn3N2 Films Prepared by Magnetron Sputtering in NH3Ar Mixture Gases[J]. Acta Photonica Sinica, 2012, 41(6): 695

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    Paper Information

    Received: Nov. 21, 2011

    Accepted: --

    Published Online: Jun. 19, 2012

    The Author Email: Hongguang LI (13220935007@163.com)

    DOI:10.3788/gzxb20124106.0695

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