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Infrared and Laser Engineering, Volume. 32, Issue 4, 335(2003)

Twyman-Green infrared phase-shifting interferometer and application

[in Chinese]*, [in Chinese], [in Chinese], and [in Chinese]
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    [1] [1] Kwon O,Wyant J C , Hayslett C R. Rough surface interferometry at 10.6μm[J]. Applied Optics,1980, 19(11): 1863-1869.

    [2] [2] Verma K, Han B. Warpage measurement on dielectric rough surfaces of micoelectronics devices by far infrared fizeau interferometry[J]. Journal of Electronic Package,2000,122:227-232.

    [3] [3] Kaushal Verma, Bongtea Han.Far-infrared fizeau interferometry[J]. Applied Optics,2001,40(28): 4891-4897.

    CLP Journals

    [1] Yuan Qun, Gao Zhishan, Li Jianxin, Zhou Yuxuan, Chu Guang, Shi Yang. Research on Techniques of Fabrication and Measurement about Fizeau Infrared Interferometer[J]. Chinese Journal of Lasers, 2011, 38(8): 808001

    [2] Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Twyman-Green infrared phase-shifting interferometer and application[J]. Infrared and Laser Engineering, 2003, 32(4): 335

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    Paper Information

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    Received: Oct. 31, 2002

    Accepted: Dec. 20, 2002

    Published Online: Apr. 28, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology