Optics and Precision Engineering, Volume. 20, Issue 1, 31(2012)
Fabrication of binary diffractive optical element by fiber laser induced backside dry etching
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CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31
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Received: Jun. 20, 2011
Accepted: --
Published Online: Feb. 14, 2012
The Author Email: Ji-min CHEN (jimin@bjut.edu.cn)
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