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Semiconductor Optoelectronics, Volume. 43, Issue 6, 1049(2022)

Design and Research of a Novel Wave-like MEMS Resonator Gyroscope

LU Haolin1...2, ZHANG Weiping1, and GU Liutao12 |Show fewer author(s)
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    LU Haolin, ZHANG Weiping, GU Liutao. Design and Research of a Novel Wave-like MEMS Resonator Gyroscope[J]. Semiconductor Optoelectronics, 2022, 43(6): 1049

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    Special Issue:

    Received: Sep. 20, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022092003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology