Semiconductor Optoelectronics, Volume. 43, Issue 6, 1049(2022)
Design and Research of a Novel Wave-like MEMS Resonator Gyroscope
In this paper, a novel wave-like disk resonator gyroscope (WDRG) with high mechanical sensitivity and low zero-bias stability was proposed and developed. The structure was designed by turning the traditional disk resonator gyroscope (DRG) rings into wavy rings, which had the potential to provide a higher thermo-elastic quality factor. In addition, the WDRG had higher fabrication error immunity compared with the traditional DRG. The performance of WDRG was further improved by optimizing the structural parameters. The influence of the main structural parameters on the WDRG′s critical performances was given through finite element method (FEM). The new prototype′s optimized thermalelastic quality factor, mechanical sensitivity, and bias stability are 450k, 1.05μm/(°/s), and 0.076°/h, respectively. Compared with traditional DRG, the zero-bias stability is significantly decreased by 90%, and the thermalelastic quality factor and mechanical sensitivity are considerably improved by 215% and 950%, respectively.
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LU Haolin, ZHANG Weiping, GU Liutao. Design and Research of a Novel Wave-like MEMS Resonator Gyroscope[J]. Semiconductor Optoelectronics, 2022, 43(6): 1049
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Received: Sep. 20, 2022
Accepted: --
Published Online: Jan. 27, 2023
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