Optics and Precision Engineering, Volume. 19, Issue 11, 2636(2011)
Effects of scanning speed on measurement results for high-speed and large-area measurement AFM
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CUI Yu-guo, HE Gao-fa, ARAI Yoshikazu, GAO Wei. Effects of scanning speed on measurement results for high-speed and large-area measurement AFM[J]. Optics and Precision Engineering, 2011, 19(11): 2636
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Received: Feb. 28, 2011
Accepted: --
Published Online: Dec. 5, 2011
The Author Email: Yu-guo CUI (cuiyuguo@nbu.edu.cn)