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Optics and Precision Engineering, Volume. 19, Issue 11, 2636(2011)

Effects of scanning speed on measurement results for high-speed and large-area measurement AFM

CUI Yu-guo1,*... HE Gao-fa2, ARAI Yoshikazu3 and GAO Wei3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    CUI Yu-guo, HE Gao-fa, ARAI Yoshikazu, GAO Wei. Effects of scanning speed on measurement results for high-speed and large-area measurement AFM[J]. Optics and Precision Engineering, 2011, 19(11): 2636

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    Received: Feb. 28, 2011

    Accepted: --

    Published Online: Dec. 5, 2011

    The Author Email: Yu-guo CUI (cuiyuguo@nbu.edu.cn)

    DOI:10.3788/ope.20111911.2636

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology