[1] [1] YUAN J L, LYU B H, HANG W, et al.. Review on the progress of ultra-precision machining technologies［J］. Frontiers of Mechanical Engineering, 2017, 12(2): 158-180.

[2] [2] BLAINEAU P, ANDR D, LAHEURTE R, et al.. Subsurface mechanical damage during bound abrasive grinding of fused silica glass［J］. Applied Surface Science, 2015, 353: 764-773.

[3] [3] WANG H R, CHEN H F, FU G L, et al.. Relationship between grinding process and the parameters of subsurface damage based on the image processing［J］. The International Journal of Advanced Manufacturing Technology, 2016, 83(9/10/11/12): 1707-1715.

[4] [4] FANG F Z, XU F F. Recent advances in micro/nano-cutting: effect of tool edge and material properties［J］. Nanomanufacturing and Metrology, 2018, 1(1): 4-31.

[5] [5] YIN J F, BAI Q, ZHANG B. Methods for detection of subsurface damage: a review［J］. Chinese Journal of Mechanical Engineering, 2018, 31: 41.

[6] [6] FEIT M, RUBENCHIK A. Influence of subsurface cracks on laser-induced surface damage［J］. Proceedings of SPIE - the International Society for Optical Engineering, 2004, 5273: 264-273.

[7] [7] CHENG J, CHEN M J, LIAO W, et al.. Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal ［J］. Optics Express, 2014, 22(23): 28740-28755.

[8] [8] GAO X, FENG G Y, ZHAI L L, et al.. Effect of subsurface impurities of fused silica on laser-induced damage probability ［J］. Optical Engineering, 2014, 53(2): 026101.

[9] [9] BUDE J, CARR C W, MILLER P E, et al.. Particle damage sources for fused silica optics and their mitigation on high energy laser systems［J］. Optics Express, 2017, 25(10): 11414-11435.

[10] [10] NAUPORT J, AMBARD C, BERCEGOL H, et al.. Optimizing fused silica polishing processes for 351 nm high power laser application［C］.Boulder Damage Symposium XL Annual Symposium on Optical Materials for High Power Lasers. Proc SPIE 7132, Laser-Induced Damage in Optical Materials: 2008, Boulder, Colorado, USA, 2008: 71321I.

[11] [11] WU H Z, ROBERTS S G, MBUS G, et al.. Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina and alumina/5vol.%SiC nanocomposites［J］. Acta Materialia, 2003, 51(1): 149-163.

[12] [12] ZHU N N, ZHU Y W, LI J, et al.. Subsurface damage depth of lithium niobate crystal in lapping［J］. Opt. Precision Eng., 2015, 23(12): 3387-3394.(in Chinese)

[13] [13] LIU Y, LIU ZH K, QIU K Q, et al.. Advances in large-aperture beam sampling gratings［J］. Opt. Precision Eng., 2016, 24(12): 2896-2901.(in Chinese)

[14] [14] NEAUPORT J, AMBARD C, CORMONT P, et al.. Subsurface damage measurement of ground fused silica parts by HF etching techniques ［J］. Optics Express, 2009, 17(22): 20448-20456.

[15] [15] BERTUSSI B, CORMONT P, PALMIER S, et al.. Initiation of laser induced damage sites in fused silica optical components［J］. Optics Express, 2009, 17(14): 11469-11479.

[16] [16] WU X P, GAO W R, HE Y, et al.. Quantitative measurement of subsurface damage with self-referenced spectral domain optical coherence tomography ［J］. Optical Materials Express, 2017, 7(11): 3919-3933.

[17] [17] EVANS C J, PAUL E, DORNFELD D, et al.. Material removal mechanisms in lapping and polishing［J］. CIRP Annals, 2003, 52(2): 611-633.

[18] [18] PAL R K, GARG H, KARAR V. Material removal characteristics of full aperture optical polishing process［J］. Machining Science and Technology, 2017, 21(4): 493-525.

[19] [19] LIAO W L, DAI Y F, LIU Z Z, et al.. Detailed subsurface damage measurement and efficient damage-free fabrication of fused silica optics assisted by ion beam sputtering［J］. Optics Express, 2016, 24(4): 4247-4257.

[20] [20] WANG J, MAIER R L. Surface assessment of CaF2 deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique［J］. Applied Optics, 2006, 45(22): 5621-5628.

[21] [21] MA B, SHEN Z X, HE P F, et al.. Subsurface quality of polished SiO2 surface evaluated by quasi-Brewster angle technique［J］. Optik, 2011, 122(16): 1418-1422.

[22] [22] ELFALLAGH F, INKSON B J. 3D analysis of crack morphologies in silicate glass using FIB tomography［J］. Journal of the European Ceramic Society, 2009, 29(1): 47-52.

[23] [23] WU H Z, ROBERTS S G, MBUS G, et al.. Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina and alumina/5vol.% SiC nanocomposites［J］. Acta Materialia, 2003, 51(1): 149-163.

[24] [24] MENAPACE J A, DAVIS P J, STEELE W A, et al.. MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique［C］. Laser-Induced Damage in Optical Materials: 2005. International Society for Optics and Photonics, 2006, 5991: 599103.

[25] [25] YIN J F, BAI Q, ZHANG B. Methods for detection of subsurface damage: a review［J］. Chinese Journal of Mechanical Engineering, 2018, 31: 41.

[26] [26] LEE Y. Evaluating subsurface damage in optical glasses［J］. Journal of the European Optical Society Rapid Publications, 2011, 6: 11001.

[27] [27] WANG J, MAIER R L, BRUNING J H. Surface characterization of optically polished CaF2 crystal by quasi-Brewster-angle technique［C］. Optical Science and Technology, SPIE′s 48th Annual Meeting. Proc SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, San Diego, California, USA, 2003: 106-114.

[28] [28] WANG J, VANKERKHOVE S, SCHREIBER H. Evaluation of coated and uncoated CaF2 optics by variable angle spectroscopic ellipsometry［J］. Thin Solid Films, 2011, 519(9): 2881-2884.