Infrared and Laser Engineering, Volume. 46, Issue 3, 302001(2017)

3D measurement decoupling criterion in optical microscopy

Liu Jian... Gu Kang, Li Mengzhou and Tan Jiubin |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(12)

    [1] [1] Peng B, Giancarlo P, Wolfgang O. Optical surface profile measurement using phase retrieval by tuning the illumination wavelength[J]. Optics Communications, 2012, 285(285):5029-5036.

    [2] [2] Zhang Mingkai, Gao Sitian, Lu Rongsheng, et al. Ultraviolet scanning linewidth measuring system[J]. Infrared and Laser Engineering, 2015, 44(2): 625-631. (in Chinese)

    [3] [3] Liu J, Wang Y, Liu C, et al. Digital differential confocal microscopy based on spatial shift transformation[J]. J Microsc, 2014, 256: 126-132.

    [4] [4] Gao Meijing, Fan Xiangrui, Gu Haihua, et al. Optical microscanning microscope thermal imaging system for electronic devices nondestructive testing[J]. Laser & Infrared, 2013, 43(7): 779-784. (in Chinese)

    [5] [5] Martin R, Thorsten D, Axel K, et al. A landmark-based 3D calibration strategy for SPM[J]. Meas Sci Technol, 2007, 18: 404-414.

    [6] [6] 2000 Geometrical product specifications(GPS)-Surface texture: Profile method; Measurement standards-Part 1: Material measures[S]. Geneva: International Organization for Standardization, 2000.

    [7] [7] Lin Dejiao, Liu Zhongyao, Zhang Rui, et al. Step-height measurement by means of a dual-frequency interferometric confocal microscope[J]. Optical Society of America, 2004, 4: 0003-6935.

    [8] [8] Liu Jian, Li Mengzhou, Li Qiang, et al. Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes[J]. Meas Sci Technol, 2016, 27(12): 125014.

    [9] [9] Nouira H, Salgado J A, El-Hayek N, et al. Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards [J]. Meas Sci Technol, 2014, 25: 044016.

    [10] [10] Yan Lisong, Wang Xiaokun, Zheng Ligong, et al. Large-diameter mirror stitching accuracy analysis based on self-test [J]. Infrared and Laser Engineering, 2014, 43(6): 1920-1924. (in Chinese)

    [11] [11] Sheppard C J R, Heaton J M. Confocal images of straight edges and surface steps [J]. Optik, 1984, 68: 371-80.

    [12] [12] Tan Jiubin, Liu Chenguang, Liu Jian, et al. Sinc2 fitting for height extraction in confocal scanning[J]. Meas Sci Technol, 2016, 27: 025006.

    CLP Journals

    [1] Liu Qian, Yuan Daocheng, He Huabin, Ji Fang. Determination and nonlinearity study of instrument transfer function of white light interferometer[J]. Infrared and Laser Engineering, 2017, 46(6): 634002

    [2] Cui Jianjun, Du Hua, Zhu Xiaoping, Xue Zi, Yan Yonggang, Chen Kai. Measurement characteristics analysis and test of 3D laser scanning confocal microscope[J]. Infrared and Laser Engineering, 2018, 47(8): 817005

    Tools

    Get Citation

    Copy Citation Text

    Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 302001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Aug. 5, 2016

    Accepted: Sep. 3, 2016

    Published Online: Jun. 27, 2017

    The Author Email:

    DOI:10.3788/irla201746.0302001

    Topics