Optical Instruments, Volume. 33, Issue 1, 78(2011)
Influence of target erosion on film distribution in magnetron sputtering process
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ZHANG Yongxi, JIN Xiu, HU Wenwen, SONG Shu, ZHANG Lingling, ZHANG Yue. Influence of target erosion on film distribution in magnetron sputtering process[J]. Optical Instruments, 2011, 33(1): 78
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Received: Aug. 13, 2010
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Published Online: Dec. 6, 2012
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