Optics and Precision Engineering, Volume. 17, Issue 10, 2493(2009)

Dual-lapping process for sapphire crystal

WEN Dong-hui*... HONG Tao, ZHANG Ke-hua and LU Cong-da |Show fewer author(s)
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    References(11)

    [1] [1] YUAN Z J. Precision and Ultra-precision Machining Technology[M]. Beijing: Mechanical engineering press,2007. (in Chinese)

    [2] [2] MARINESCU I D,UHLMANN E,DOI T. Handbook of Lapping and Polishing[M]. CRC Press, 2006.

    [3] [3] ZHOU L B,SHIMIZU J,SHINOHARA K,et al..Three-dimensional kinematical analyses for surface grinding of large scale substrate[J].Precision Engineering,2003,27(2):175-184.

    [4] [4] HU G X. Polishing mechanism and process optimization durning dual-polishing silicon wafer[D]. Master dissertation, Zhejiang University of Technology,2006. (in Chinese)

    [5] [5] WANG Y Z,LIU S L,PENG G L,et al.. Effects of surface treatment on sapphire substrates[J].Journal of Crystal Growth,2005,174:241-245.

    [6] [6] NIU X H,LIU Y L,TAN B M,et al..Method of surface treatment on sapphire substrate[J]. Transactions Nonferrous Metal Society of China,2006,16:732-734.

    [7] [7] LU C D. Study on free damage mechanism of precision lapping sapphire wafer for high lighting light-emitting diode[D].Hangzhou:Zhejiang University of Technology,2007. (in Chinese)

    [8] [8] WANG J,LIU Y L, TAN B M,et al.. Fine Polishing of Sapphire Substrates[J]. Microelectronics, 2006,36(1):46-48. (in Chinese)

    [9] [9] SAITOW T,HIRAYAMA T,YAMAMOTO T,et al..Lattice strain and dislocations in polished surfaces on sapphire[J].Journal of American Ceramic Society,2005,88(8):2277-2285.

    [10] [10] ZHU H L,TESSAROTO L A,SABIA R. Chemical mechanical polishing (CMP) anisotropy in sapphire[J]. Applied Surface Science,2004,236:120-130.

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    CLP Journals

    [1] XIE Chun, WANG Jia-lin, TANG Hui-li. Subsurface damage of sapphire crystal after lapping with boron carbide abrasives[J]. Optics and Precision Engineering, 2017, 25(12): 3070

    [2] WANG Jian-bin, ZHU Yong-wei, XIE Chun-xiang, XU Jun, JU Zhi-lan. Role of slurry in single crystal sapphire lapping with fixed abrasive pad[J]. Optics and Precision Engineering, 2014, 22(11): 3004

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    WEN Dong-hui, HONG Tao, ZHANG Ke-hua, LU Cong-da. Dual-lapping process for sapphire crystal[J]. Optics and Precision Engineering, 2009, 17(10): 2493

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    Paper Information

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    Received: Jul. 15, 2008

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Dong-hui WEN (wendh@zjut.edu.cn)

    DOI:

    CSTR:32186.14.

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