[1] [1] WU Z Z,QIAN X X,LI X Y,et al..MOEMS device and its applications [J].Opt．Precision Eng.,2004,12(Supp.):36-39.(in Chinese)

[2] [2] ZHANG Y,PAN W.Design and analysis of a MEMS horizontal torsion micro mirror with folded springs[J].Opt.Precision Eng.,2005,13(Supp.):81-85.(in Chinese)

[3] [3] ZHA Y,SUN D G,LIU T G,et al..Rearrangeable nonblocking 8×8 optical matrix switch with extended BANYAN network [J].Opt.Precision Eng.,2007,15(1):50-56.(in Chinese)

[4] [4] KUROSAWA M K.State-of-the-art surface acoustic wave motor and its future applications[J].Ultrason.,2000,38:15-19.

[5] [5] SHIGEMATSU T,KUROSAWA M K,ASAI K,et al..Sub-nanometer stepping drive of surface acoustic wave motor[C].IEEE-NANO,2003,1:299-302.

[6] [6] SHIGEMATSU T,KUROSAWA M K.Miniaturized SAW motor with 100 MHz drive frequency[C].IEEE J,2004:482-485.

[7] [7] ASAI K，KUROSAWA M K.Surface acoustic wave motor using an energy circulation driving method[C].IEEE Ultrasonic Symp.,2001:525-529.

[8] [8] YAMANOUCHI K,FURUYASHIKI H.New low-loss filters using internal floating electrode reflection types of single-phase unidirectional trans-ducer[J].Electron,Lett.,1984,20(24):989-990.

[9] [9] TAKEUCHI M,YAMANOUCHI K.Coupled mode analysis of DAW floating electrode type unidirectional transducers[J].IEEE Trans.,UFFC,1993,40:648-658.

[10] [10] MORGAN D P.Quas-static of floating-electrode unidirectional SAW Transducers[C].IEEE Ultrasonics Syrup.,2001,48(5):1289-1297.