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Optoelectronics Letters, Volume. 12, Issue 3, 188(2016)

Effects of discharge power on the structural and optical properties of TGZO thin films prepared by RF magnetron sputtering technique

Jin-hua GU1...2,*, Zhou LU2, Zhi-you ZHONG2,3, Lu LONG2 and Hao LONG2 |Show fewer author(s)
Author Affiliations
  • 1Center of Experiment Teaching, South-Central University for Nationalities, Wuhan 430074, China
  • 2College of Electronic Information Engineering, South-Central University for Nationalities, Wuhan 430074, China
  • 3Hubei Key Laboratory of Intelligent Wireless Communications, South-Central University for Nationalities, Wuhan
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    GU Jin-hua, LU Zhou, ZHONG Zhi-you, LONG Lu, LONG Hao. Effects of discharge power on the structural and optical properties of TGZO thin films prepared by RF magnetron sputtering technique[J]. Optoelectronics Letters, 2016, 12(3): 188

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    Paper Information

    Received: Dec. 18, 2015

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Jin-hua GU (jinhwagu@163.com)

    DOI:10.1007/s11801-016-5265-5

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology