Acta Optica Sinica, Volume. 28, Issue 3, 472(2008)
Optimization of Double Bottom Antireflective Coating for Hyper Numerical Aperture Lithography
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Zhou Yuan, Li Yanqiu. Optimization of Double Bottom Antireflective Coating for Hyper Numerical Aperture Lithography[J]. Acta Optica Sinica, 2008, 28(3): 472
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